公开(公告)号：US06781694B2

公开(公告)日：2004-08-24

申请号：US10242351

申请日：2002-09-13

申请人： Michael Nahum ,  Benjamin K. Jones ,  Patrick A. Renalds ,  Avron M. Zwilling ,  Kim W. Atherton

发明人： Michael Nahum ,  Benjamin K. Jones ,  Patrick A. Renalds ,  Avron M. Zwilling ,  Kim W. Atherton

IPC分类号： G01N2125

CPC分类号： G01D5/34707 ,  G01D5/34776 ,  G01D5/34792

摘要： An absolute 2D position-sensing device is usable to measure the relative position of two elements. A 2D absolute scale includes an integrated 2D absolute scale pattern extending over the 2D scale area along each measuring axis of the scale. The integrated 2D absolute scale pattern includes a plurality of periodic portions interleaved with a plurality of non-periodic portions along each axis. Each periodic portion includes a plurality of periodically-placed scale elements. Each non-periodic portion includes a plurality of code elements indicative of an absolute measurement value. The code elements may have a length that is narrower along each measuring axis is than the length of the periodic scale elements along each measuring axis. The offset of the periodically-placed elements relative to a readhead of the device is combined with the absolute measurement value to determine an absolute position.

摘要翻译： 绝对的2D位置感测装置可用于测量两个元件的相对位置。 2D绝对刻度包括沿尺度的每个测量轴在2D刻度区域上延伸的集成2D绝对刻度图案。 集成的2D绝对刻度图案包括沿着每个轴与多个非周期性部分交错的多个周期性部分。 每个周期部分包括多个周期性放置的刻度元件。 每个非周期性部分包括指示绝对测量值的多个代码元素。 代码元素可以具有沿着每个测量轴比沿着每个测量轴线的周期性刻度元素的长度更窄的长度。 周期性放置的元件相对于器件的读数头的偏移与绝对测量值组合以确定绝对位置。