公开(公告)号：US07516507B1

公开(公告)日：2009-04-14

申请号：US10984321

申请日：2004-11-08

申请人： Michael Oxsen ,  Scott Petersen ,  Yassin Mehmandoust

发明人： Michael Oxsen ,  Scott Petersen ,  Yassin Mehmandoust

IPC分类号： B08B11/02

CPC分类号： B08B1/04 ,  B08B3/12 ,  G11B23/505 ,  H01L21/67046

摘要： Substrate preparation systems comprising multi-zone cascade brush scrubbers having sonic assemblies disposed between one or more of the scrubber zones for cleaning of disk-shaped substrates, including silicon wafers and disks for data storage devices, such as hard disk drives (HDD), compact discs (CD) and digital video discs (DVD). The system method combines a sonic particle dislodgement/removal assembly into a cascade brush scrubber line comprising a longi-tudinal array of brush pairs in which the substrates process through preparation zones defined by each pair of brushes, the substrates being transited longitudinally through the zones while rotating on an axis normal to their faces. Piezoelectric transducer arrays transmit sound energy to one or both face(s) of the substrate to dislodge and/or remove particles, and the scrubber simultaneously or thereafter sweeps away the particulates. The sonic energy may be ultrasonic, megasonic, or both, applied to the substrate surface(s) in alternating or sequential process steps.

摘要翻译： 衬底制备系统包括多区级联刷洗涤器，其具有设置在一个或多个洗涤器区域之间的用于清洁盘形基底的声波组件，包括用于数据存储设备的硅晶片和盘，例如硬盘驱动器（HDD），紧凑型 光盘（CD）和数字视频光盘（DVD）。 系统方法将声波粒子移动/移除组件组合成级联刷洗涤器管线，其包括刷子对的纵向阵列，其中衬底通过由每对刷子限定的制备区域进行处理，衬底沿纵向穿过区域，而 在垂直于其脸部的轴上旋转。 压电换能器阵列将声能传递到衬底的一个或两个面，以移除和/或去除颗粒，并且洗涤器同时或此后扫除颗粒。 声波能量可以是超声波，兆声波或两者，以交替或顺序的工艺步骤施加到衬底表面。