公开(公告)号：US06521082B1

公开(公告)日：2003-02-18

申请号：US10124161

申请日：2002-04-16

申请人： Michael S Barnes ,  Hongqing Shan

发明人： Michael S Barnes ,  Hongqing Shan

IPC分类号： H05H100

CPC分类号： H01J37/32623 ,  H01J37/3266

摘要： Within both a magnetically enhanced plasma apparatus and a magnetically enhanced plasma method there is employed: (1) a repetitive and geometrically selective pulsing of a magnetic field from a first level to a second level within a reactor chamber; and (2) a repetitive pulsing of a radio frequency power from a first level to a second level within the reactor chamber when repetitively and geometrically selectively pulsing from the first level to the second level the magnetic field within the reactor chamber. The concurrent repetitive pulsings provide a plasma within the reactor chamber with enhanced plasma uniformity and enhanced ion energy control.

摘要翻译： 在磁增强等离子体装置和磁增强等离子体方法两者中，采用：（1）在反应器室内从第一级到第二级的磁场的重复和几何选择性脉冲; 以及（2）当从所述反应器室中的所述第一电平到所述第二电平将所述磁场重复地和几何地选择性地脉冲时，从所述反应器室内的第一电平到所述第二电平的射频功率的重复脉冲。 同时的重复脉冲在反应器室内提供等离子体，具有增强的等离子体均匀性和增强的离子能量控制。