公开(公告)号：US20060083639A1

公开(公告)日：2006-04-20

申请号：US11041956

申请日：2005-01-26

申请人： Min-Sheng Liu ,  Chi-Chuan Wang ,  Bing-Chwen Yang ,  Yu-Ching Cheng ,  Wen-Jeng Chang

发明人： Min-Sheng Liu ,  Chi-Chuan Wang ,  Bing-Chwen Yang ,  Yu-Ching Cheng ,  Wen-Jeng Chang

IPC分类号： F04B17/00

CPC分类号： F04B43/046

摘要： A PDMS valve-less micro pump structure includes a PDMS body having a contour surface, a membrane covering the contour surface of the PDMS body, and a PZT actuator located on the membrane. The contour surface of the PDMS body to be sealed by the membrane and the PZT actuator has in series a lead-in cavity, a lead-in nozzle structure, a main cavity, a lead-out nozzle structure, and a lead-out cavity. The PZT actuator is located right above the main cavity. By providing the PDMS as a material to form the body of the micro pump, the micro pump can then be mass-produced with less cost and simpler structuring. Also, substantial elasticity and bio-compatibility for the micro pump can be achieved.

摘要翻译： PDMS无阀微泵结构包括具有轮廓表面的PDMS体，覆盖PDMS体的轮廓表面的膜和位于膜上的PZT致动器。 由膜和PZT致动器密封的PDMS体的轮廓表面具有串联的引入腔，引入喷嘴结构，主腔，引出喷嘴结构和引出腔 。 PZT执行器位于主腔的正上方。 通过提供PDMS作为形成微型泵主体的材料，微型泵可以以较低的成本和更简单的结构进行批量生产。 此外，可以实现微型泵的显着的弹性和生物相容性。