公开(公告)号：US6113165A

公开(公告)日：2000-09-05

申请号：US166058

申请日：1998-10-02

申请人： Ming Chien Wen ,  Ching Hsu Ho ,  Yu Tsung Fu ,  Kwen Sz Lin

发明人： Ming Chien Wen ,  Ching Hsu Ho ,  Yu Tsung Fu ,  Kwen Sz Lin

IPC分类号： H01L21/687 ,  B65G65/00

CPC分类号： H01L21/68707 ,  Y10S294/907 ,  Y10S414/141

摘要： A self-sensing wafer holder in a robot blade is described which includes a holder body of generally elongated shape adapted for carrying a wafer on a top surface and at least three sensors positioned on the holder body sufficiently away from each other to form a plane that is covered by the wafer. The at least three sensors can be of the capacitive type, the optical type or the weight sensing type. The wafer holder is capable of determining whether a wafer is properly seated on top of the holder and automatically stopping the motion of the robot blade when a misplacement is detected by utilizing a sensing circuit including logic gates.

摘要翻译： 描述了一种机器人刀片中的自感晶片保持器，其包括适于在顶表面上承载晶片的大致细长形状的保持器主体和位于保持器主体上的至少三个传感器，该至少三个传感器足够远离彼此以形成平面， 被晶片覆盖。 至少三个传感器可以是电容型，光学类型或重量感测类型。 晶片保持器能够通过利用包括逻辑门的感测电路来确定晶片是否被正确地安置在保持器的顶部上并且当检测到错位时自动停止机器人刀片的运动。