公开(公告)号：US20070160321A1

公开(公告)日：2007-07-12

申请号：US11566184

申请日：2006-12-01

申请人： Ming-Chiang Wu ,  Chao-Hsi Chi

发明人： Ming-Chiang Wu ,  Chao-Hsi Chi

IPC分类号： G02B6/28 ,  G02B6/34

CPC分类号： G02B6/12007 ,  G02B6/12021

摘要： Wavelength-selective 1×N switches (WSSs) and N×N cross-connects (WSXCs) are described which are fabricated as monolithic or hybrid devices. In a preferred embodiment, the optic ports, dispersion elements, and collimating elements are formed on a single monolithic substrate. A micromirror and actuator are either fabricated within the substrate or a separate micromirror is utilized forming a hybrid WSS or WSXC. The optical elements can be formed in an opaque substrate layer (e.g., silicon, SOI, and so forth) or in an optically transparent layer of a PLC material (e.g., silica-on-silicon). Embodiments describe the use of linear and rotary comb drives for actuating front surface mirrors, or solid-immersion micromirrors (SIMs). The switching devices reduce system footprint while reducing or eliminating the need for alignment of the optical elements.

摘要翻译： 描述了波长选择性1xN交换机（WSS）和NxN交叉连接（WSXC），其被制造为单片或混合设备。 在优选实施例中，光学端口，色散元件和准直元件形成在单个整体式衬底上。 微镜和致动器在衬底内制造，或者使用单独的微镜形成混合WSS或WSXC。 光学元件可以形成在不透明的衬底层（例如，硅，SOI等等）中或者在PLC材料的光透明层（例如硅上硅）上。 实施例描述了线性和旋转梳状驱动器用于致动前表面镜或固体浸没式微镜（SIM）的用途。 开关器件减少或消除了对光学元件对准的需要，减少了系统占用面积。