Wafer Container With Purgeable Supporting Module
    1.
    发明申请
    Wafer Container With Purgeable Supporting Module 有权
    具有可吹扫支持模块的晶圆容器

    公开(公告)号:US20110266193A1

    公开(公告)日:2011-11-03

    申请号:US13183522

    申请日:2011-07-15

    IPC分类号: H01L21/673 B65D81/20

    摘要: A wafer container includes a container body, composed of a pair of side walls, a top surface, and a bottom surface, a supporting module being disposed on each of said sidewall for supporting a plurality of wafers; and a door joining with opening of the container body with its inner surface for protecting the plurality of wafers within the container body, the characteristic in that: a purgeable supporting module is respectively disposed between each sidewall to of the container body and the back wall, a long slit is further disposed on the side of purgeable supporting module facing the opening and a porous material is disposed within the long slit, and an air inlet is further disposed on one end of the purgeable supporting module for being connected to a gas valve, wherein the purgeable supporting module is composed of a plurality of supporting ribs vertically arranged at intervals.

    摘要翻译: 晶片容器包括由一对侧壁,顶表面和底表面组成的容器主体,支撑模块设置在每个所述侧壁上以支撑多个晶片; 以及与容器主体的开口连接的门,其内表面用于保护容器主体内的多个晶片,其特征在于,可拆卸的支撑模块分别设置在容器主体和后壁的每个侧壁之间, 在可清洗支撑组件的面对开口的一侧进一步设置长缝隙,并且多孔材料设置在长缝隙内,并且空气入口还设置在可清洗支撑模块的一端,用于连接到气阀, 其特征在于,所述可吹扫支撑模块由多个以间隔垂直排列的支撑肋构成。

    Wafer container with purgeable supporting module
    2.
    发明授权
    Wafer container with purgeable supporting module 有权
    晶圆容器带可清洗支撑模块

    公开(公告)号:US08387799B2

    公开(公告)日:2013-03-05

    申请号:US13183522

    申请日:2011-07-15

    IPC分类号: B65D85/30 H01L21/673

    摘要: A wafer container includes a container body, formed by a pair of side walls, a top surface, and a bottom surface, a supporting module being disposed on each of said sidewall for supporting a plurality of wafers; and a door joining with opening of the container body with its inner surface for protecting the plurality of wafers within the container body, the characteristic in that: a purgeable supporting module is respectively disposed between each sidewall to of the container body and the back wall, a long slit is further disposed on the side of purgeable supporting module facing the opening and a porous material is disposed within the long slit, and an air inlet is further disposed on one end of the purgeable supporting module for being connected to a gas valve, wherein the purgeable supporting module is composed of a plurality of supporting ribs vertically arranged at intervals.

    摘要翻译: 晶片容器包括由一对侧壁,顶表面和底表面形成的容器体,支撑模块设置在每个所述侧壁上以支撑多个晶片; 以及与容器主体的开口连接的门,其内表面用于保护容器主体内的多个晶片,其特征在于,可拆卸的支撑模块分别设置在容器主体和后壁的每个侧壁之间, 在可清洗支撑组件的面对开口的一侧进一步设置长缝隙,并且多孔材料设置在长缝隙内,并且空气入口还设置在可清洗支撑模块的一端,用于连接到气阀, 其特征在于,所述可吹扫支撑模块由多个以间隔垂直排列的支撑肋构成。