公开(公告)号：US20090108853A1

公开(公告)日：2009-04-30

申请号：US12256192

申请日：2008-10-22

申请人： Minoru Yuyama ,  Hiroyuki IIZUKA

发明人： Minoru Yuyama ,  Hiroyuki IIZUKA

IPC分类号： G01B7/06 ,  G01R27/26

CPC分类号： G01B7/08 ,  G01B7/22 ,  G01B2210/44

摘要： There are provided a measurement apparatus and a measurement method capable of stably measuring the physical quantity involved in a measurement object. Two or more electrostatic capacity type displacement sensing devices are mutually connected in their earths and apply to the measuring heads carrier signals each including a sinusoidal wave of a same frequency wherein a sum total of phases becomes 0°, respectively, so that a thickness of the measurement object is measured.

摘要翻译： 提供了能够稳定地测量测量对象中涉及的物理量的测量装置和测量方法。 两个或更多个静电容量型位移感测装置在它们的地球中相互连接，并且应用于每个包括相位频率的正弦波的测量头载波信号，其中相位的总和相位分别变为0°，使得 测量对象被测量。