公开(公告)号：US09511471B2

公开(公告)日：2016-12-06

申请号：US14079906

申请日：2013-11-14

申请人： Mitsubishi Hitachi Power Systems, Ltd.

发明人： Atsuya Hirano ,  Keiko Shishime ,  Takeshi Kudo ,  Kazuto Mikazuki ,  Koki Sato ,  Hideo Yoda

IPC分类号： B24B39/00 ,  B24B39/02 ,  G05B19/404

CPC分类号： B24B39/003 ,  B23P9/02 ,  B24B39/02 ,  G05B19/404 ,  Y10T29/47

摘要： A burnishing device and method are provided that enable burnishing processing to be reliably performed on a surface included in an object to be processed and having a change in height and inclination angle. The device includes a burnishing tool having a pressing unit that rotationally presses a surface of an object to be processed, the surface having a change in height and inclination angle; a tool driving device configured to move the burnishing tool; a strain sensor configured to detect the strain amount of the burnishing tool; and a computer that calculates pressing force to be applied by the pressing unit in a normal direction of the surface of the object to be processed, calculates correction amount of displacement of the tool driving device in a pressing direction based on calculated pressing force and stored pressing force in advance, and outputs the correction amount to the tool driving device.

摘要翻译： 提供了一种抛光装置和方法，其使抛光处理能够可靠地在包括在待处理物体中的表面上进行，并且具有高度和倾斜角度的变化。 该装置包括具有按压单元的抛光工具，该按压单元旋转地压迫被处理物体的表面，该表面具有高度和倾斜角度的变化; 被配置为移动所述抛光工具的工具驱动装置; 应变传感器，被配置为检测所述抛光工具的应变量; 以及计算机，其计算由所述按压单元沿所述被加工物的表面的法线方向施加的按压力，基于计算出的按压力，计算出所述工具驱动装置在按压方向上的位移量的校正量， 并且将校正量输出到工具驱动装置。