公开(公告)号：US20250112612A1

公开(公告)日：2025-04-03

申请号：US18960125

申请日：2024-11-26

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toru YAMAJI ,  Sunao YAMAZAKI ,  Hiroya SUZUKI

IPC: H03H9/02 ,  H03H9/05

Abstract: An acoustic wave device includes a piezoelectric layer, at least one pair of electrodes, and a protective film. The piezoelectric layer includes first and second major surfaces opposing each other in a first direction. The at least one pair of electrodes are on at least one of the first and second major surfaces. The protective film covers at least a portion of the pair of electrodes. The protective film includes a first-component insulative film including a first component and in contact with the pair of electrodes, and a second-component insulative film including a second component and located at the surface layer of the protective film. The first-component insulative film has a higher moisture resistance than the second-component insulative film. The second-component insulative film has a higher plasma resistance than the first-component insulative film.

公开(公告)号：US20250015779A1

公开(公告)日：2025-01-09

申请号：US18897222

申请日：2024-09-26

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toru YAMAJI ,  Sunao YAMAZAKI ,  Hiroya SUZUKI

IPC: H03H9/13 ,  H03H9/02

Abstract: An acoustic wave device includes a support including a support substrate, a piezoelectric layer on the support in a first direction, a functional electrode on the piezoelectric layer, and a reinforcement film on the piezoelectric layer. The support includes a space portion that opens on a side of the piezoelectric layer, and an extended passage extending farther toward an outer side than an edge of the space portion in a second direction intersecting the first direction. A through-hole is provided at a position not overlapping the functional electrode in plan view in the first direction, communicates with the extended passage, and penetrates the piezoelectric layer. The reinforcement film is provided in a region between the through-hole and the space portion and overlaps at least a portion of a region where the piezoelectric layer and the extended passage overlap each other in the plan view.

公开(公告)号：US20240283429A1

公开(公告)日：2024-08-22

申请号：US18646892

申请日：2024-04-26

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Hiroya SUZUKI

IPC: H03H9/60 ,  H03H9/54 ,  H03H9/58

CPC classification number: H03H9/605 ,  H03H9/542 ,  H03H9/581

Abstract: A filter device includes at least one series arm resonator connected in series in a signal line and including first and second end portions, parallel arm resonators connected between the signal line and ground, and a capacitor. The parallel arm resonators include a first parallel arm resonator connected on a first end portion side of the at least one series arm resonator, and a second parallel arm resonator connected on a second end portion side of the at least one series arm resonator. The first parallel arm resonator includes a third parallel arm resonator and a fourth parallel arm resonator each connected to the first end portion. The third parallel arm resonator is connected directly to the ground and the fourth parallel arm resonator is connected to the ground via the capacitor.

公开(公告)号：US20240380379A1

公开(公告)日：2024-11-14

申请号：US18781028

申请日：2024-07-23

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Hiroya SUZUKI ,  Sunao YAMAZAKI ,  Toru YAMAJI

IPC: H03H9/13 ,  H03H9/05 ,  H03H9/17

Abstract: An acoustic wave device includes an element substrate, a piezoelectric layer, a functional electrode on the piezoelectric layer, and a mounting substrate. The element substrate includes a gap portion at a position overlapping at least a portion of the functional electrode as seen in a lamination direction of the element substrate and the piezoelectric layer, and the mounting substrate includes a ground electrode at a position overlapping the functional electrode in the lamination direction.