公开(公告)号：US09970802B2

公开(公告)日：2018-05-15

申请号：US15153977

申请日：2016-05-13

申请人： Murata Manufacturing Co., Ltd.

发明人： Taro Nishino ,  Kansho Yamamoto ,  Katsumi Fujimoto

IPC分类号： G01F1/68 ,  G01F1/688 ,  G01P5/10 ,  G01F1/684 ,  G01F1/692 ,  G01F1/69 ,  G01F15/14

CPC分类号： G01F1/6886 ,  G01F1/6845 ,  G01F1/69 ,  G01F1/692 ,  G01F15/14 ,  G01P5/10

摘要： A thermal-type flow-rate sensor includes a substrate and a detection unit that is supported by the substrate and at least an upper surface of which is exposed to a flow of a fluid. The detection unit includes: an insulating layer, a heating element arranged on an upper surface of the insulating layer, an upstream temperature measurement element that is arranged on the upper surface of the insulating layer upstream of the heating element in the flow direction that includes a pyroelectric layer, and a downstream temperature measurement element arranged on the upper surface of the insulating layer so as to be positioned downstream of the heating element in the flow direction and that includes a pyroelectric layer.

公开(公告)号：US20160252382A1

公开(公告)日：2016-09-01

申请号：US15153977

申请日：2016-05-13

申请人： Murata Manufacturing Co., Ltd.

发明人： Taro Nishino ,  Kansho Yamamoto ,  Katsumi Fujimoto

IPC分类号： G01F15/14 ,  G01F1/69

CPC分类号： G01F1/6886 ,  G01F1/6845 ,  G01F1/69 ,  G01F1/692 ,  G01F15/14 ,  G01P5/10

摘要： A thermal-type flow-rate sensor includes a substrate and a detection unit that is supported by the substrate and at least an upper surface of which is exposed to a flow of a fluid. The detection unit includes: an insulating layer, a heating element arranged on an upper surface of the insulating layer, an upstream temperature measurement element that is arranged on the upper surface of the insulating layer upstream of the heating element in the flow direction that includes a pyroelectric layer, and a downstream temperature measurement element arranged on the upper surface of the insulating layer so as to be positioned downstream of the heating element in the flow direction and that includes a pyroelectric layer.

摘要翻译： 热式流量传感器包括基板和由基板支撑的至少其上表面暴露于流体流的检测单元。 检测单元包括：绝缘层，布置在绝缘层的上表面上的加热元件，上游温度测量元件，其布置在沿着流动方向的加热元件上游的绝缘层的上表面上，该上游温度测量元件包括 热电层和布置在绝缘层的上表面上的下游温度测量元件，以便沿着流动方向位于加热元件的下游，并且包括热电层。