公开(公告)号：US4714834A

公开(公告)日：1987-12-22

申请号：US767048

申请日：1985-08-19

Applicant: Murray R. Shubaly

Inventor： Murray R. Shubaly

IPC: H01J27/10 ,  H01J27/20

CPC classification number: H01J27/10

Abstract: In an ion beam source, the plasma is contained near the extraction front by a cup-shaped magnetic field for improved stability and uniformity. The intermediate electrode has a profiled electron beam aperture having a first narrowest section, a second slightly wider section, and the third, known, conical section. The anode electrode or anode insert has a very narrow entrance aperture followed by outwardly flared, longer, section.

Abstract translation: 在离子束源中，通过杯形磁场将等离子体包含在提取前端附近，以提高稳定性和均匀性。 中间电极具有成型的电子束孔，其具有第一最窄部分，第二稍宽的部分，以及第三已知的锥形部分。 阳极电极或阳极插入件具有非常窄的入口孔径，随后向外扩张，较长的截面。