TORQUE SENSOR
    1.
    发明申请

    公开(公告)号:US20230010885A1

    公开(公告)日:2023-01-12

    申请号:US17783416

    申请日:2020-12-11

    IPC分类号: G01L3/10

    摘要: A torque sensor includes: a first area, a second area provided around the first area, a plurality of beams connecting the first area and the second area, and a detector configured to detect torque applied between the first area and the second area, the detector being provided on the first area. The detector includes an insulation film layered on the first area and a strain gauge layered on the insulation film and deformable in accordance with the torque.