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1.发明授权Vacuum coating apparatus having sealing means formed of membranes and fibers 失效具有由膜和纤维形成的密封装置的真空涂布装置
公开(公告)号：US3040702A
公开(公告)日：1962-06-26
申请号：US74309658
申请日：1958-06-19
Applicant: NAT RES CORP
Inventor： ALBERT ENG , HNILICKA JR MILO P , LIGHT JOHN S , WALSH ARTHUR G
IPC: C23C14/56
CPC classification number: C23C14/562
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