公开(公告)号：US20160209202A1

公开(公告)日：2016-07-21

申请号：US14602259

申请日：2015-01-21

Applicant: NATIONAL APPLIED RESEARCH LABORATORIES

Inventor： Yu-Hsuan LIN ,  Chih-Chung YANG ,  Kuo-Cheng HUANG ,  Tai-Shan LIAO

IPC: G01B11/08

CPC classification number: G01B11/08 ,  G01B11/24

Abstract: A method for determining if a wire guide roller having a plurality of V-shaped grooves, each having a copper line thereon, arranged column-by-column on a periphery direction thereof is failed after slicing a plurality of wafers is disclosed. Based on the disclosed technical means, the efficacy may be achieved that a damage situation may be automatically examined and notified to maintain a yield in the slicing process in an online high speed environment.

Abstract translation: 公开了一种用于确定在切片多个晶片之后是否具有在其周向上逐列排列设置有多个V形槽的线引导辊的方法。 基于所公开的技术手段，可以实现在在线高速环境中可以自动检查和通知损伤情况以在切片过程中保持产量的功效。