公开(公告)号：US20150155194A1

公开(公告)日：2015-06-04

申请号：US14280703

申请日：2014-05-19

Applicant: NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： YANG-KUO KUO ,  JIAN-LONG RUAN ,  CHENG-HUNG SHIH ,  LEA-HWUNG LEU

IPC: H01L21/683 ,  C04B37/00

CPC classification number: C04B37/00 ,  B32B18/00 ,  C04B2235/6562 ,  C04B2235/6565 ,  C04B2235/6567 ,  C04B2235/661 ,  C04B2237/366 ,  H01L21/6831

Abstract: A method of preparing a heterogeneous stacked co-fired ceramic for use in an aluminum nitride-based electrostatic chuck includes providing a first aluminum nitride blank layer; applying a metal ink to the first aluminum nitride blank layer to form thereon an electrostatic electrode layer by screen printing, wherein the metal ink mainly contains a metal of high melting point; stacking a second aluminum nitride blank layer on the electrostatic electrode layer; laminating the first aluminum nitride blank layer, the electrostatic electrode layer, and the second aluminum nitride blank layer (collectively known as a heterogeneous ceramic) together; and co-firing the laminated heterogeneous ceramic in accordance with a sintering temperature rising curve to prepare the heterogeneous stacked co-fired ceramic characterized by reduced differences in sintering shrinkage ratio between the electrostatic electrode and aluminum nitride blank and enhanced strength and adhesion of the interface between the electrostatic electrode and aluminum nitride blank.

Abstract translation: 一种制备用于氮化铝基静电卡盘的异质堆叠共烧陶瓷的方法，包括提供第一氮化铝坯料层; 将金属油墨施加到第一氮化铝坯料层上，通过丝网印刷在其上形成静电电极层，其中金属油墨主要含有高熔点金属; 在所述静电电极层上堆叠第二氮化铝坯料层; 将第一氮化铝坯料层，静电电极层和第二氮化铝空白层（统称为异质陶瓷）层叠在一起; 并根据烧结温度升高曲线共烧烧层压的异相陶瓷，制备出异质层叠共烧陶瓷，​​其特征在于静电电极和氮化铝坯料之间的烧结收缩率差异减小，并提高了强度和界面附着力 静电电极和氮化铝空白。