公开(公告)号：US20180175281A1

公开(公告)日：2018-06-21

申请号：US15735277

申请日：2016-06-01

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Kiyoshi SHIMAMURA ,  Encarnacion Antonia GARCIA VILLORA ,  Isao SAKAGUCHI ,  Naoki OHASHI

IPC: H01L41/187 ,  H01L41/113 ,  H01L41/41 ,  C30B33/02

Abstract: A piezoelectric material for a combustion pressure sensor, a method for producing the piezoelectric material, and a combustion pressure sensor using the piezoelectric material are provided. The piezoelectric material of the present invention includes a single crystal containing Ca, Ta, an element M (M is Al or Ga), Si, and O, the single crystal has the same crystal structure as the crystal structure of langasite represented by La3Ga5SiO14, and at least the content of the element M is insufficient for the stoichiometric composition represented by Ca3TaM3Si2O14. Preferably, in a case where the element M is Ga, each content of the Ca and the Si is excessive for the stoichiometric composition, and in a case where the element M is Al, the content of the Ca is excessive for the stoichiometric composition, and the content of the Ta is insufficient for the stoichiometric composition.