公开(公告)号：US20220057372A1

公开(公告)日：2022-02-24

申请号：US17434911

申请日：2020-02-14

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Taro YAKABE ,  Gaku IMAMURA ,  Genki YOSHIKAWA ,  Akiko NAKAMURA

IPC: G01N33/00 ,  G01N19/00 ,  G01L1/18

Abstract: The present invention provides a hydrogen sensor having a high sensitivity and low hysteresis characteristics while having a simple configuration and low cost. The present invention shows that a membrane-type surface stress sensor having an amorphous palladium-copper-silicon alloy as a sensitive film has low hysteresis and can detect a nitrogen gas to which hydrogen at a very low concentration of 0.25 ppm is added and a pure nitrogen gas with a sufficiently high S/N ratio.