公开(公告)号：US20160077021A1

公开(公告)日：2016-03-17

申请号：US14781208

申请日：2014-03-19

Applicant: NEC CORPORATION

Inventor： Tsutomu ISHI ,  Takayuki SUDOU ,  Taku TSUBOI

IPC: G01N21/94 ,  G01N21/88

CPC classification number: G01N21/94 ,  G01N21/8806 ,  G01N33/02 ,  G01N2201/061 ,  G01N2201/066 ,  G01N2201/068

Abstract: Disclosed is an imaging system capable of reducing the generation of interference patterns in a state in which a beam of highly coherent electromagnetic waves is enlarged to a prescribed illumination area and used for illumination by moving the prescribed illumination region within a range of motion that is smaller than the illumination region.

Abstract translation: 公开了一种成像系统，其能够在高度相干的电磁波的波长扩大到规定的照明区域的状态下减少干涉图案的产生，并且通过在规定的照明区域的移动范围内移动规定的照明区域来进行照明 比照明区域。