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公开(公告)号：US20220377880A1
公开(公告)日：2022-11-24
申请号：US17746212
申请日：2022-05-17
Applicant: NEC Corporation
Inventor： Yoshihito HASHIMOTO , Tsuyoshi YAMAMOTO , Kohei MATSUURA
Abstract: A sample holder includes a base comprising a support structure and a printed circuit board (PCB) in contact with the base. The PCB has a through hole. The PCB has a cavity in at least a part of the base below the through hole. The support structure that supports a surface of a chip and is electrically connected to the base. The support structure is disposed in the cavity. At least a part of the section supporting the chip in the support structure is not parallel to the back surface of the chip.
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