公开(公告)号：US20040124595A1

公开(公告)日：2004-07-01

申请号：US10737816

申请日：2003-12-18

Applicant: NHK SPRING CO., LTD.

Inventor： Shinya Miyaji ,  Shinji Saito

IPC: B23B031/28

CPC classification number: B23Q3/154 ,  Y10T279/23

Abstract: The present invention relates to an electrostatic chuck in which unification of a dielectric layer and a heating and cooling flange is omitted, whereby production cost can be decreased, resulting in having adequate corrosion resistance especially for high temperature processes for semiconductor. The electrostatic chuck comprises a stage and a dielectric layer formed on an upper surface of the stage by thermal spraying, and the dielectric layer is made of magnesium oxide.

Abstract translation: 本发明涉及一种静电卡盘，其中省略了电介质层和加热和冷却法兰的统一，从而可以降低生产成本，从而具有足够的耐腐蚀性，特别是对于半导体的高温工艺。 静电卡盘包括通过热喷涂形成在台的上表面上的载物台和电介质层，并且电介质层由氧化镁制成。

公开(公告)号：US20040196614A1

公开(公告)日：2004-10-07

申请号：US10814304

申请日：2004-04-01

Applicant: NHK SPRING CO., LTD.

Inventor： Shinya Miyaji ,  Xinwei Chen ,  Shinji Saito

IPC: H02H001/00

CPC classification number: H01L21/6831

Abstract: The present invention provides an electrostatic chuck comprising a substrate, a dielectric layer formed by thermal spraying on an upper face of the substrate, an internal electrode embedded in the dielectric layer, a feeder terminal portion extending from a lower face of the substrate to the internal electrode, and an electrode provided in the feeder terminal portion, wherein the feeder terminal portion and the substrate are fixed to each other by mechanical joining.

Abstract translation: 本发明提供一种静电卡盘，其包括基板，通过在基板的上表面上的热喷涂形成的电介质层，嵌入在电介质层中的内部电极，从基板的下表面延伸到内部的馈电端子部 电极和设置在馈电端子部分中的电极，其中馈电端子部分和基板通过机械接合彼此固定。

公开(公告)号：US20010055190A1

公开(公告)日：2001-12-27

申请号：US09840691

申请日：2001-04-20

Applicant: NHK Spring Co., Ltd.

Inventor： Shinji Saito ,  Toshihiko Hanamachi ,  Takashi Kayamoto

IPC: H02N013/00

CPC classification number: B23Q3/154 ,  H01L21/6831 ,  H01L21/6833 ,  H02N13/00 ,  Y10T279/23

Abstract: An electrostatic chuck comprising a ceramic chuck body having an adsorption face and an electrode for applying a potential to the adsorption face, the chuck body including a ceramic consisting mainly of MgO. The ceramic that consists mainly of MgO is doped with one or more additives selected from a group including TiC, TiO2, ZrO2, V2O5, Nb2O5, Ta2O5, Co3O4, Cr2O3, and NiO so that its electrical resistivity in a working temperature region ranges from 1null108 to 1null1012 nullnullcm. This electrostatic chuck is highly resistant to a corrosive environment such as fluoride plasma.

Abstract translation: 一种静电吸盘，包括具有吸附面的陶瓷卡盘体和用于向吸附面施加电位的电极，卡盘主体包括主要由MgO组成的陶瓷。 主要由MgO组成的陶瓷掺杂有选自TiC，TiO2，ZrO2，V2O5，Nb2O5，Ta2O5，Co3O4，Cr2O3和NiO的一种或多种添加剂，使得其在工作温度范围内的电阻率范围为1×10 8 至1x1012 OMEGA.cm。 这种静电卡盘对诸如氟化物等离子体的腐蚀性环境具有很高的抵抗力。