SUBSTANCE DETECTION SYSTEM AND SUBSTANCE DETECTION METHOD

    公开(公告)号:US20190265177A1

    公开(公告)日:2019-08-29

    申请号:US16409884

    申请日:2019-05-13

    摘要: A substance detection system and a substance detection method are provided. The temperature identifying portion identifies a surface temperature of the quartz substrate, based on a difference between a deviation of the fundamental wave frequency from at least any predetermined reference fundamental wave frequency of the reference crystal resonator and the detecting crystal resonator and a deviation of the third harmonic frequency from a predetermined reference third harmonic frequency. The substance identifying portion identifies a temperature at which a contaminant attached to the detecting crystal resonator is desorbed from the detecting crystal resonator to identify the contaminant based on the temperature at which the contaminant is desorbed. The temperature is identified based on a difference between the fundamental wave frequency of the reference crystal resonator and the fundamental wave frequency of the detecting crystal resonator measured by the frequency measuring portion and the temperature identified by the temperature identifying portion.