公开(公告)号：US11639904B2

公开(公告)日：2023-05-02

申请号：US16607657

申请日：2017-04-26

申请人： NIKON CORPORATION

发明人： Takeshi Ohbayashi ,  Masayuki Zaike ,  Takahiro Michimoto

IPC分类号： G01N23/046 ,  G01N23/083

摘要： An inspection device includes a ray source that irradiates an object to be inspected with energy rays, a detection unit that detects energy rays that have passed through the object to be inspected, a displacement mechanism that sets a relative position of the object to be inspected and the ray source by displacing at least one of the object to be inspected and the ray source in relation to the other, an internal image generation unit that generates an internal image of the object to be inspected based on a detection amount distribution of the energy rays detected by the detection unit, and a control unit that controls the displacement mechanism based on the detection amount distribution of the energy rays detected by the detection unit.