公开(公告)号：US10044160B2

公开(公告)日：2018-08-07

申请号：US15238064

申请日：2016-08-16

Applicant: NIKON CORPORATION

Inventor： Naoto Inaba ,  Akira Tokuhisa

IPC: G03B27/72 ,  H01S3/00 ,  G03F7/20

Abstract: A pulsed light generating method for generating a pulsed light by cutting out a laser light outputted from a laser light source with an intensity modulation type electro optic modulator, wherein: the electro optic modulator is driven by use of a drive signal that changes a voltage applied to the electro optic modulator between a voltage lower than a reference voltage and a voltage higher than the reference voltage, the reference voltage being a voltage applied to the electro optic modulator at which a transmittance of the laser light transmitting through the electro optic modulator is local maximum.