公开(公告)号：US11851741B2

公开(公告)日：2023-12-26

申请号：US16612411

申请日：2018-05-09

申请人： NIPPON ITF, INC.

发明人： Takehiko Ooshiro ,  Yukako Fukutani ,  Koji Miyake

IPC分类号： C23C14/06 ,  C23C14/24 ,  C23C14/32 ,  C23C16/26 ,  F16C33/10

CPC分类号： C23C14/0605 ,  C23C14/0611 ,  C23C14/243 ,  C23C14/325 ,  C23C16/26 ,  F16C33/1025 ,  Y10T428/30

摘要： A hard carbon film that forms a sliding surface of a sliding member, wherein the hard carbon film includes terminal atoms that bond to carbon atoms and has a plurality of protruding shaped parts, part of which protrude from the surface thereof, with the periphery of each of the plurality of protruding shaped parts being terminated by a terminal atom. A manufacturing method for the hard carbon film for producing the hard carbon film on a sliding surface of the sliding member using arc vapor deposition having graphite as the vaporization source, wherein a gas containing the terminal atoms that bond to carbon atoms is introduced, and the plurality of protruding shaped parts is grown on the surface of the hard carbon film while terminating the periphery of the plurality of protruding shaped parts by bonding of the terminal atoms to carbon atoms.