公开(公告)号：US10428416B2

公开(公告)日：2019-10-01

申请号：US15511639

申请日：2014-09-17

申请人： NIPPON ITF, INC. ,  NIPPON PISTON RING CO., LTD.

发明人： Hideki Moriguchi ,  Tadashi Saito ,  Yoshikazu Tanaka ,  Tetsumi Arahi ,  Katsuaki Ogawa ,  Takahiro Okazaki ,  Hiroyuki Sugiura ,  Yoshihiro Ito

IPC分类号： C23C14/06 ,  B82Y40/00 ,  C23C14/02 ,  C23C14/58 ,  C01B32/05 ,  C01B32/15

摘要： Provided are a coating film, a manufacturing method for the same, and a PVD device that not only sufficiently improve the balance of low-friction properties and wear resistance, but also improve chipping resistance (defect resistance) and peeling resistance. This coating film coats a substrate surface, wherein a hard carbon layer is formed extending in columns-shape perpendicular to the substrate when observed in a cross-sectional bright-field TEM image, the hard carbon layer is formed using a PVD method, and the ID/IG ratio is 1-6 when the hard carbon layer is measured using Raman spectroscopy, said ratio being the ratio of the Raman spectrum D band peak area intensity and G band peak area intensity.

公开(公告)号：US10457885B2

公开(公告)日：2019-10-29

申请号：US15511638

申请日：2014-09-17

申请人： NIPPON ITF, INC. ,  NIPPON PISTON RING CO., LTD.

发明人： Hideki Moriguchi ,  Tadashi Saito ,  Yoshikazu Tanaka ,  Akinori Shibata ,  Tetsumi Arahi ,  Katsuaki Ogawa ,  Takahiro Okazaki ,  Hiroyuki Sugiura ,  Yoshihiro Ito

IPC分类号： C10M103/02 ,  C23C14/06 ,  C01B32/05 ,  C23C14/32

摘要： Provided are a coating film, a manufacturing method for the same, and a PVD device that not only sufficiently improve the balance of low-friction properties and wear resistance, but also improve chipping resistance and peeling resistance. This film is coated on a substrate surface, wherein the coating film has a hard carbon that presents relatively black and white when observed in a cross-sectional bright-field TEM image, a mesh-shaped hard carbon layer is formed using a PVD method, said layer having white-colored hard carbon in a mesh shape extending in the thickness direction and black-colored hard carbon dispersed into the cavities in the mesh, and the ID/IG ratio is 1-6 when the mesh-shaped hard carbon layer is measured using Raman spectroscopy, said ratio being the ratio of the Raman spectrum D band peak area intensity and G band peak area intensity.