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公开(公告)号:US12235580B2
公开(公告)日:2025-02-25
申请号:US17345631
申请日:2021-06-11
Applicant: NISSAN CHEMICAL CORPORATION
Inventor: Takumi Oya , Hiroki Yamaguchi , Suguru Sassa
IPC: G03F7/11 , B01J39/20 , B01J41/13 , C09D125/18 , C09D163/00
Abstract: A method for producing an ion-exchange resin having a water content of 5% by weight or less, a method for producing a lithography coating film forming-composition using the ion-exchange resin, and a method for washing the ion-exchange resin. The methods include the step of passing an organic solvent having a water content of 150 ppm or less through an ion-exchange resin precursor having a water content of 40% by weight or more, where a dehydration efficiency defined by the following equation is 5 or more: Dehydration efficiency=Dehydration rate (%)/[Weight of the organic solvent used per unit weight of the ion-exchange resin precursor (kg/kg)×Washing time (h)].