公开(公告)号：US20160054329A1

公开(公告)日：2016-02-25

申请号：US14778779

申请日：2014-04-08

Applicant: NORTHEASTERN UNIVERSITY

Inventor： Samira FAEGH ,  Nader JALILI ,  Srinivas SRIDHAR

IPC: G01N33/66

CPC classification number: G01N33/66 ,  G01G3/16 ,  G01N29/022 ,  G01N29/036 ,  G01N33/5438 ,  G01N2291/0257

Abstract: An interchangeable sensor system is described, including: a microcantilever including a beam anchored at a first end, the beam being free to vibrate on another end, wherein a piezoelectric layer is deposited on a surface of the beam; an input configured to receive a voltage from a voltage source for applying voltage to the piezoelectric layer; and a resonating circuit including: the piezoelectric layer, configured as a capacitor of the resonant circuit; and one or more additional electrical elements; wherein the voltage source is configured to apply a first AC voltage under a first condition for actuating the microcantilever at a first mechanical resonating frequency of the microcantilever and a second AC voltage under a second condition for actuating the microcantilever at a second electrical resonating frequency of the resonating circuit. Method of using the sensor system is also described.

Abstract translation: 描述了一种可互换的传感器系统，包括：一个微型悬臂梁，包括一个锚定在第一端的梁，该梁在另一端自由振动，其中压电层沉积在梁的表面上; 被配置为从电压源接收用于向所述压电层施加电压的电压的输入; 以及谐振电路，包括：所述压电层，被配置为所述谐振电路的电容器; 和一个或多个附加电气元件; 其中所述电压源被配置为在第一条件下施加第一AC电压，以在所述微悬臂梁的第一机械谐振频率下起动所述微悬臂梁，并且在第二条件下施加第二AC电压，以在所述第二状态下以所述微悬臂梁的第二电共振频率致动所述微悬臂梁 谐振电路。 还描述了使用传感器系统的方法。