公开(公告)号：US20140261183A1

公开(公告)日：2014-09-18

申请号：US13941860

申请日：2013-07-15

Applicant: NURI TECH CO., LTD. ,  Samsung Display Co., Ltd.

Inventor： JAE CHEOL PARK ,  Chunghyuk Lee ,  Daeho Song ,  Nakcho Choi ,  Gyeongeun Eoh ,  Minjeong Oh ,  Min-Woo Lee ,  Sangkyun Bae

IPC: C23C14/54

CPC classification number: C23C16/00 ,  B05D1/60

Abstract: A coating apparatus including an evaporation part, a thermal decomposition part, a deposition chamber, a vacuum pump, and a discharge pipe. The deposition chamber includes an upper portion, a lower portion facing the upper portion, and a sidewall portion connecting the upper portion and the lower portion to each other and including an inlet, first outlet, a second outlet, a third outlet and a fourth outlet. The discharge pipe includes a first auxiliary pipe connected to the first outlet and the second outlet, a second auxiliary pipe connected to the third outlet and the fourth outlet, an intermediate pipe connected to the first auxiliary pipe and the second auxiliary pipe, and a main pipe connected to the intermediate pipe. The vacuum pump is configured to discharge a portion of the monomer of the deposition material, which is not deposited, from the deposition chamber through the discharge pipe.

Abstract translation: 包括蒸发部分，热分解部分，淀积室，真空泵和排出管的涂覆装置。 沉积室包括上部，面向上部的下部和将上部和下部彼此连接的侧壁部，并且包括入口，第一出口，第二出口，第三出口和第四出口 。 排出管包括连接到第一出口和第二出口的第一辅助管，连接到第三出口和第四出口的第二辅管，连接到第一辅管和第二辅管的中间管，以及主管 管道连接到中间管道。 真空泵被配置为通过排出管将未沉积的沉积材料的单体的一部分从沉积室排出。