公开(公告)号：US20250002331A1

公开(公告)日：2025-01-02

申请号：US18346154

申请日：2023-06-30

Applicant: NXP USA, Inc.

Inventor： Mostafa Soliman ,  Aaron A. Geisberger

IPC: B81B7/02 ,  B81C1/00 ,  G01C19/574

Abstract: A MEMS device and method of forming the same includes paired masses suspended above a substrate includes linkages that couple pairs of masses to each other. Inner sense linkages couple interior edges of adjacent masses to each other. The inner sense linkages are configured to exhibit a first stiffness when the adjacent masses coupled to each inner sense linkage move out-of-phase relative to each other along a preferred axis of the inner sense linkages and to exhibit a second, increased stiffness in response to in-phase motion of the adjacent masses coupled to each inner sense linkage.

公开(公告)号：US20250020464A1

公开(公告)日：2025-01-16

申请号：US18221923

申请日：2023-07-14

Applicant: NXP USA, Inc.

Inventor： Mostafa Soliman ,  Aaron A. Geisberger ,  Margaret Leslie Kniffin ,  Raghavendra N. Sridhar

IPC: G01C19/5719 ,  G01P15/08

Abstract: A MEMS inertial sensor device, method of operation, and fabrication process are described with a MEMS inertial sensor, drive actuation unit, drive measurement unit, and PLL circuit coupled together in operational engagement, where the MEMS inertial sensor includes a substrate, a proof mass positioned in spaced apart relationship above the substrate, a proof mass suspension member connected on a first end to the proof mass and connected on a second end to an anchor fixed to the substrate to enable the proof mass to laterally oscillate over the surface of the substrate, and a compliant stop structure positioned in relation to the proof mass suspension member to physically engage with lateral oscillating movement of the proof mass suspension member past a desired stroke travel distance without physically preventing lateral oscillating movement of the proof mass, thereby stiffening a spring stiffness measure of the proof mass suspension member.