公开(公告)号：US20020123187A1

公开(公告)日：2002-09-05

申请号：US10058416

申请日：2002-01-30

Applicant: National Inst. of Advanced Ind, Science and Tech.

Inventor： Masaki Misawa

IPC: H01L021/8238

CPC classification number: G01T1/2985

Abstract: The polygon-type semiconductor detector for use in a high-speed X-ray CT according to the present invention enables a high resolution, and allows the time and cost for manufacturing to be significantly reduced, by virtue of the detection pixel group thereof having mutually homogeneous characteristics. First, X-ray modules are each constructed by arranging a plurality of X-ray detection pixels (4) formed by means of photolithography in a line on a single planar semiconductor substrate constituted of CdTe. Then, by polygonally arranging a plurality of these X-ray modules on the circumference of a measuring section around a measuring area, this polygon-type semiconductor detector is formed. Thereby, when a multiphase fluid having mutually different densities flows in the measuring area (10), this polygon-type semiconductor detector can acquire the projection data of internal density distributions at a high speed.

Abstract translation: 根据本发明的用于高速X射线CT的多边形半导体检测器能够实现高分辨率，并且由于具有相互的检测像素组，可以显着地减少制造的时间和成本 均质特性。 首先，通过在由CdTe构成的单个平面状半导体基板上的一行中配置通过光刻形成的多个X射线检测像素（4）来构成X射线模块。 然后，通过在测量区域周围的测量区域的圆周上多个排列多个X射线模块，形成该多边形半导体检测器。 因此，当在测量区域（10）中流动具有相互不同的密度的多相流体时，该多边形半导体检测器可以高速获取内部密度分布的投影数据。