Abstract:
A method of producing a carbon nanotube film structure having a substrate and a carbon nanotube layer, comprises a placing step of placing a carbon nanotube film comprising a plurality of carbon nanotubes aligned in one direction within a film plane on the substrate; and a densifying step of applying a densifying treatment to the carbon nanotube film thereby forming the carbon nanotube layer having the weight density of the carbon nanotube to 0.1 g/cm3 or more. Thus, a problem of island-like shrinkage caused while a highly densified CNT layer is being manufactured is solved, and a high-quality CNT film structure wherein the aligned CNT layer having a high density and uniform thickness is deposited on the substrate.
Abstract translation:一种具有基板和碳纳米管层的碳纳米管膜结构体的制造方法,其特征在于,包括:在基板的膜面内配置包含在一个方向上排列的多个碳纳米管的碳纳米管膜的放置工序; 以及对碳纳米管膜进行致密处理的致密化步骤,从而形成碳纳米管的重量密度为0.1g / cm 3以上的碳纳米管层。 因此,解决了在制造高度致密化的CNT层时引起的岛状收缩的问题,并且在基板上沉积具有高密度和均匀厚度的排列CNT层的高质量CNT膜结构。