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公开(公告)号：US20160363490A1
公开(公告)日：2016-12-15
申请号：US15178976
申请日：2016-06-10
Applicant: NextInput, Inc.
Inventor： Ian Campbell , Ryan Diestelhorst , Dan Benjamin , Steven S. Nasiri
IPC: G01L1/18
Abstract: An example MEMS force sensor is described herein. The MEMS force sensor can include a cap for receiving an applied force and a sensor bonded to the cap. A trench and a cavity can be formed in the sensor. The trench can be formed along at least a portion of a peripheral edge of the sensor. The cavity can define an outer wall and a flexible sensing element, and the outer wall can be arranged between the trench and the cavity. The cavity can be sealed between the cap and the sensor. The sensor can also include a sensor element formed on the flexible sensing element. The sensor element can change an electrical characteristic in response to deflection of the flexible sensing element.
Abstract translation: 这里描述了示例性MEMS力传感器。 MEMS力传感器可以包括用于接收施加的力的盖和结合到盖的传感器。 可以在传感器中形成沟槽和空腔。 沟槽可以沿着传感器的周缘的至少一部分形成。 空腔可以限定外壁和柔性感测元件，并且外壁可以布置在沟槽和空腔之间。 空腔可以密封在盖和传感器之间。 传感器还可以包括形成在柔性感测元件上的传感器元件。 传感器元件可以响应于柔性传感元件的偏转而改变电特性。
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公开(公告)号：US10466119B2
公开(公告)日：2019-11-05
申请号：US15178976
申请日：2016-06-10
Applicant: NextInput, Inc.
Inventor： Ian Campbell , Ryan Diestelhorst , Dan Benjamin , Steven S. Nasiri
Abstract: An example MEMS force sensor is described herein. The MEMS force sensor can include a cap for receiving an applied force and a sensor bonded to the cap. A trench and a cavity can be formed in the sensor. The trench can be formed along at least a portion of a peripheral edge of the sensor. The cavity can define an outer wall and a flexible sensing element, and the outer wall can be arranged between the trench and the cavity. The cavity can be sealed between the cap and the sensor. The sensor can also include a sensor element formed on the flexible sensing element. The sensor element can change an electrical characteristic in response to deflection of the flexible sensing element.
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