公开(公告)号：US20250093259A1

公开(公告)日：2025-03-20

申请号：US18817594

申请日：2024-08-28

Applicant: Nikira Labs Inc.

Inventor： Manish Gupta ,  John Brian Leen ,  Rupal Gupta ,  Nabil Saad ,  Andrew P. Chan

IPC: G01N21/25 ,  G01N21/03 ,  G01N21/39

Abstract: A method of measuring a quantity or characteristic of a qualified air, e.g., clean air or prefiltered air, present in an environment, e.g., a chamber or a cleanroom, includes freely placing a measurement apparatus with an open multipass cell in the environment, and allowing a qualified air, such as clean air or prefiltered air, present in the environment to move freely into and out of an optical cavity of the open multipass cell. The method further includes obtaining a measurement of a quantity or a characteristic based on the qualified air in the optical cavity.