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公开(公告)号:US20220305733A1
公开(公告)日:2022-09-29
申请号:US17701098
申请日:2022-03-22
申请人: Nikon Corporation
发明人: Victor Itliong Solidum , Kristopher Daniel Sanford , Alton Hugh Phillips , Lexian Guo , Patrick Shih Chang , Johnathan Agustin Marquez , Yeong-Jun Choi
IPC分类号: B29C64/329 , B29C64/153 , B29C64/245 , B29C64/255 , B29C64/268 , B29C64/386 , B33Y30/00 , B33Y40/00 , B33Y50/00 , G01F23/263 , G01F23/20 , G01F23/292
摘要: A level sensor assembly (552) for estimating a level of a dielectric powder (412) in a container assembly (544) includes a first electrode member (554) that is coupled to the container assembly (544); a second electrode member (556) that is coupled to the container assembly (544): and a control system (424). The second electrode member (556) is spaced apart from the first electrode member (554) and configured so that powder (512) in the container assembly (544) is positioned at least partly between the electrode members (554) (556). The control system (424) utilizes a capacitance between the electrode members (554) (556) to estimate the level of the powder (512) in the container assembly (544).