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公开(公告)号：US20220413211A1
公开(公告)日：2022-12-29
申请号：US17772758
申请日：2019-11-06
发明人： Josuke Ozaki , Akinori Fujino , Naonori Ueda
摘要： Provided is an optical modulator manufacturing method capable of determining the quality of an optical modulator having MMI waveguides and realizing improvement in yield during manufacturing. Here, in waveguide fabrication processes, hard mask material deposition, soft mask material application, exposure, and hard mask fabrication are executed, and then in hard mask width length measurement, the hard mask width for fabricating the MMI waveguide is measured at one or more locations. In hard mask width quality determination based on machine learning results, the quality of optical characteristics of the chip is predicted and determined in advance, based on sample data created in advance by analyzing a relationship between the hard mask width and optical characteristics of the optical modulator, depending on whether the hard mask width is present in a permissible range of the sample data. Depending on the result of the above-mentioned determination the mask fabrication is redone.
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公开(公告)号：US11859992B2
公开(公告)日：2024-01-02
申请号：US17040518
申请日：2019-03-26
发明人： Hitoshi Shimizu , Tatsushi Matsubayashi , Yusuke Tanaka , Takuma Otsuka , Hiroshi Sawada , Tomoharu Iwata , Naonori Ueda
CPC分类号： G01C21/3492 , G01C21/3691 , G08G1/065
摘要： The present disclosure relates to an apparatus and methods of estimating a traffic volume of moving objects. In particular, the present disclosure estimates the traffic volume based on amounts of traffic volume of the moving objects observed at observation points based on a routing matrix and a visitor matrix. The routing matrix indicates whether moving objects that pass through specific waypoints are to be observed at an observation point. The visitor matrix indicates whether a moving object departing or arriving at the observation point. The present disclosure enables estimating a traffic volume of moving objects on various routes based on observed data with errors in data and varying lengths in observation periods.
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公开(公告)号：US12038603B2
公开(公告)日：2024-07-16
申请号：US17772758
申请日：2019-11-06
发明人： Josuke Ozaki , Akinori Fujino , Naonori Ueda
摘要： Provided is an optical modulator manufacturing method capable of determining the quality of an optical modulator having MMI waveguides and realizing improvement in yield during manufacturing. Here, in waveguide fabrication processes, hard mask material deposition, soft mask material application, exposure, and hard mask fabrication are executed, and then in hard mask width length measurement, the hard mask width for fabricating the MMI waveguide is measured at one or more locations. In hard mask width quality determination based on machine learning results, the quality of optical characteristics of the chip is predicted and determined in advance, based on sample data created in advance by analyzing a relationship between the hard mask width and optical characteristics of the optical modulator, depending on whether the hard mask width is present in a permissible range of the sample data. Depending on the result of the above-mentioned determination.
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