Method and apparatus for fabricating semiconductor lasers
    1.
    发明申请
    Method and apparatus for fabricating semiconductor lasers 审中-公开
    用于制造半导体激光器的方法和装置

    公开(公告)号:US20030058909A1

    公开(公告)日:2003-03-27

    申请号:US10196956

    申请日:2002-07-18

    Inventor: William Benyon

    CPC classification number: H01S5/0042 H01S5/0201

    Abstract: A method and system for fabricating semiconductor lasers includes the determination of a statistical predictive relationship between attribute measurements and mode index values for lasers fabricated according to a design. The predictive relationship predicts a specific mode index value using a specific attribute measurement. The predictive relationship may be applied in a fabrication process for lasers subsequently fabricated according to the design, and an appropriate grating structure providing increased production of lasers that lase at substantially target wavelengths is enabled.

    Abstract translation: 用于制造半导体激光器的方法和系统包括确定根据设计制造的激光器的属性测量和模式指标值之间的统计预测关系。 预测关系使用特定属性测量来预测特定模式指标值。 预测关系可以应用于随后根据设计制造的激光器的制造工艺中,并且能够实现提供增加的基本上目标波长的激光器的生产的适当的光栅结构。

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