公开(公告)号：US20180031983A1

公开(公告)日：2018-02-01

申请号：US15728744

申请日：2017-10-10

Applicant: Nova Measuring Instruments Ltd.

Inventor： Boaz BRILL ,  Moshe FINAROV ,  David SCHEINER

IPC: G03F7/20 ,  G01N21/956 ,  G01N21/95 ,  G01N21/47 ,  G01B11/27 ,  H01L21/66 ,  G01B11/14

Abstract: Alignment of layers during manufacture of a multi-layer sample is controlled by applying optical measurements to a measurement site in the sample. The measurement site includes two diffractive structures located one above the other in two different layers, respectively. The optical measurements include at least two measurements with different polarization states of incident light, each measurement including illuminating the measurement site so as to illuminate one of the diffractive structures through the other. The diffraction properties of the measurement site are indicative of a lateral shift between the diffractive structures. The diffraction properties detected are analyzed for the different polarization states of the incident light to determine an existing lateral shift between the layers.