ULTRASOUND TRANSDUCER ELEMENT AND ULTRASOUND ENDOSCOPE
    1.
    发明申请
    ULTRASOUND TRANSDUCER ELEMENT AND ULTRASOUND ENDOSCOPE 审中-公开
    超声波传感器元件和超声内镜

    公开(公告)号:US20150245811A1

    公开(公告)日:2015-09-03

    申请号:US14711176

    申请日:2015-05-13

    CPC classification number: A61B8/4483 A61B8/12 B06B1/0292 H01L28/60

    Abstract: An ultrasound transducer element including a cell group constituted by a plurality of ultrasound transducer cells, wherein each of the plurality of ultrasound transducer cells includes a lower electrode arranged on a substrate, a membrane including an upper electrode arranged facing the lower electrode with a cavity positioned therebetween, and a plurality of pillars forming the cavity by supporting the membrane, and each cavity mutually communicates with one another.

    Abstract translation: 一种超声波换能器元件,包括由多个超声换能器单元构成的单元组,其中,所述多个超声波振子单元中的每一个包括布置在基板上的下电极,包括面向所述下电极排列的上电极的膜, 以及通过支撑膜形成空腔的多个支柱,并且每个空腔彼此相互连通。

    ULTRASOUND UNIT AND ULTRASOUND ENDOSCOPE
    2.
    发明申请
    ULTRASOUND UNIT AND ULTRASOUND ENDOSCOPE 审中-公开
    超声单位和超声内镜

    公开(公告)号:US20140114195A1

    公开(公告)日:2014-04-24

    申请号:US14145138

    申请日:2013-12-31

    Abstract: An ultrasound unit includes an ultrasound array that has a plurality of ultrasound elements, each of which has a first principal surface that is rectangular where a transmitting and receiving portion, a signal electrode terminal, and a ground electrode terminal are arranged in a longer side direction, longer sides of the ultrasound elements being coupled, one or more short-lines that are connected to a plurality of ground electrode terminals, a ground line that is connected to the short-line, and a plurality of signal lines, each of which is connected to one of the signal electrode terminals, and adjoining ultrasound elements of the ultrasound elements are coupled such that the signal electrode terminals are arranged alternately on opposite sides in the longer side direction of the transmitting and receiving portions that are rectangular.

    Abstract translation: 超声单元包括具有多个超声波元件的超声波阵列,每个超声波元件具有矩形的第一主表面,其中发送和接收部分,信号电极端子和接地电极端子沿长边方向 耦合超声波元件的长边,连接到多个接地电极端子的一个或多个短线,连接到短线的接地线,以及多条信号线 连接到一个信号电极端子,并且超声波元件的邻接的超声波元件被耦合,使得信号电极端子交替地布置在矩形的发送和接收部分的长边方向的相对侧上。

    ULTRASOUND ELEMENT AND ULTRASOUND ENDOSCOPE
    4.
    发明申请
    ULTRASOUND ELEMENT AND ULTRASOUND ENDOSCOPE 有权
    超声元件和超声内镜

    公开(公告)号:US20140128741A1

    公开(公告)日:2014-05-08

    申请号:US14152058

    申请日:2014-01-10

    CPC classification number: B06B1/0622 A61B8/12 A61B8/445 A61B8/4483 B06B1/0292

    Abstract: An ultrasound element includes a silicon substrate, a lower electrode layer that has a plurality of lower electrode sections, and a plurality of lower wiring sections, and is connected to a lower electrode terminal to which a drive signal and a bias signal are applied, a lower insulating layer, an upper insulating layer in which a plurality of cavities smaller than the respective lower electrode sections are formed, an upper electrode layer that has a plurality of upper electrode sections that are disposed to face the respective lower electrode sections via the respective cavities, and are smaller than the lower electrode sections and larger than the cavities, and a plurality of upper wiring sections, and is connected to an upper electrode terminal at a ground potential that detects a capacitance signal, and a protection layer.

    Abstract translation: 超声波元件包括硅衬底,具有多个下电极部分的下电极层和多个下布线部分,并且连接到施加驱动信号和偏置信号的下电极端子, 下绝缘层,形成有多个小于相应的下电极部分的空腔的上绝缘层,具有多个上电极部分的上电极层,所述上电极部分经由相应的空腔设置为面对各个下电极部分 并且比下部电极部分小且大于空腔,以及多个上部布线部分,并且连接到检测电容信号的接地电位的上部电极端子和保护层。

    ULTRASOUND ELEMENT AND ULTRASOUND ENDOSCOPE
    5.
    发明申请
    ULTRASOUND ELEMENT AND ULTRASOUND ENDOSCOPE 有权
    超声元件和超声内镜

    公开(公告)号:US20140121526A1

    公开(公告)日:2014-05-01

    申请号:US14150210

    申请日:2014-01-08

    Abstract: A US element includes a silicon substrate, wherein a lower electrode layer that has a plurality of lower electrode sections, and a plurality of lower wiring sections, and is connected to a lower electrode terminal to which a drive signal and a bias signal are applied, a lower insulating layer, an upper insulating layer in which a plurality of cavities are formed, an upper electrode layer that has a plurality of upper electrode sections and a plurality of upper wiring sections, and is connected to an upper electrode terminal at a ground potential for detecting a capacitance signal, and a protection layer are sequentially stacked on the silicon substrate, and the US element further includes a shield electrode section that is formed at least at an upper side of the lower wiring sections, and is connected to a shield electrode terminal at a ground potential.

    Abstract translation: US元件包括硅衬底,其中具有多个下电极部分的下电极层和多个下布线部分连接到施加有驱动信号和偏置信号的下电极端子, 下绝缘层,形成有多个空腔的上绝缘层,具有多个上电极部分和多个上布线部分的上电极层,并且以接地电位连接到上电极端子 用于检测电容信号,并且保护层依次堆叠在硅衬底上,并且US元件还包括屏蔽电极部分,其形成在下部布线部分的至少上侧,并且与屏蔽电极 终端处于地电位。

    ULTRASONIC ELEMENT AND ENDOSCOPE
    6.
    发明申请

    公开(公告)号:US20220167944A1

    公开(公告)日:2022-06-02

    申请号:US17672826

    申请日:2022-02-16

    Abstract: An ultrasonic element includes at least one cMUT provided to a substrate, wherein the cMUT includes a first electrode provided to the substrate, a frame member having a cavity, a second electrode disposed to face the first electrode with the cavity interposed between the second electrode and the first electrode, and a protective layer covering the second electrode, a length of the cavity in an X axis direction being longer than a width of the cavity in a Y axis direction, the protective layer having a convex region extending in the X axis direction, a width of the convex region in the Y axis direction varying.

    ULTRASOUND UNIT AND ULTRASOUND ENDOSCOPE
    7.
    发明申请
    ULTRASOUND UNIT AND ULTRASOUND ENDOSCOPE 审中-公开
    超声单位和超声内镜

    公开(公告)号:US20150164470A1

    公开(公告)日:2015-06-18

    申请号:US14629588

    申请日:2015-02-24

    Abstract: An ultrasound unit includes: ultrasound elements each including a plurality of ultrasound cells formed on a substrate including a semiconductor, the plurality of ultrasound cells each including an upper electrode having a ground potential and a lower electrode to which a drive signal is applied, the upper electrode and the lower electrode being arranged facing each other via a cavity and thereby forming a first capacitor; a package member in which the plurality of ultrasound elements are disposed, the package member having a ground potential; and an insulation member disposed between the package member and each of the ultrasound elements. A second capacitor is formed as a result of the insulation member serving as a gap, and a capacity of a third capacitor serially connected to the second capacitor is smaller than a capacity of the second capacitor.

    Abstract translation: 超声波单元包括:超声波元件,每个超声波元件包括形成在包括半导体的基板上的多个超声波单元,所述多个超声波单元各自包括具有接地电位的上部电极和施加驱动信号的下部电极, 电极和下电极经由空腔相对地布置,从而形成第一电容器; 其中设置有多个超声波元件的封装构件,所述封装构件具有接地电位; 以及设置在所述包装构件和每个所述超声元件之间的绝缘构件。 作为绝缘构件作为间隙的结果形成第二电容器,并且与第二电容器串联连接的第三电容器的容量小于第二电容器的容量。

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