公开(公告)号：US12097074B2

公开(公告)日：2024-09-24

申请号：US17672826

申请日：2022-02-16

Applicant: OLYMPUS CORPORATION

Inventor： Kazuya Matsumoto ,  Masahiro Katashiro

IPC: A61B8/00 ,  A61B8/12

CPC classification number: A61B8/4494 ,  A61B8/12 ,  A61B8/4444

Abstract: An ultrasonic element includes at least one cMUT provided to a substrate, wherein the cMUT includes a first electrode provided to the substrate, a frame member having a cavity, a second electrode disposed to face the first electrode with the cavity interposed between the second electrode and the first electrode, and a protective layer covering the second electrode, a length of the cavity in an X axis direction being longer than a width of the cavity in a Y axis direction, the protective layer having a convex region extending in the X axis direction, a width of the convex region in the Y axis direction varying.