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公开(公告)号：US20020176161A1
公开(公告)日：2002-11-28
申请号：US10094722
申请日：2002-03-11
发明人： Takashi Yoneyama , Nobuaki Sakai
IPC分类号： G02B021/26
摘要： In a microscope system in which at least one of a stage on which a sample 4 is mounted and an objective lens 6 can move relatively in a direction of an optical axis, a contact judgment section 12 judges the possibility of contact between the sample 4 and the objective lens 6 based on a result of comparison between a detection output from a contact sensor 11 which detects contact between the sample 4 and the objective lens 6 and a preset threshold value, excessive contact between the sample 4 and the objective lens 6 is avoided based on a result of this judgment, and a threshold value in the contact judgment section 12 is updated based on the output from the contact sensor 11 every predetermined time.
摘要翻译： 在其中安装有样品4的阶段和物镜6可以沿光轴方向相对移动的阶段中的至少一个的显微镜系统中，接触判断部12判断样品4与样品4之间的接触的可能性 物镜6基于来自检测样品4与物镜6之间的接触的接触传感器11的检测输出与预设阈值之间的比较结果，避免了样品4与物镜6之间的过度接触 基于该判定结果，根据来自接触传感器11的每一预定时间的输出来更新接触判定部12中的阈值。
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公开(公告)号：US20040169915A1
公开(公告)日：2004-09-02
申请号：US10794163
申请日：2004-03-04
发明人： Takashi Yoneyama , Nobuaki Sakai
IPC分类号： G21K007/00 , G01N023/00 , G02B021/00
摘要： In a microscope system in which at least one of a stage on which a sample 4 is mounted and an objective lens 6 can move relatively in a direction of an optical axis, a contact judgment section 12 judges the possibility of contact between the sample 4 and the objective lens 6 based on a result of comparison between a detection output from a contact sensor 11 which detects contact between the sample 4 and the objective lens 6 and a preset threshold value, excessive contact between the sample 4 and the objective lens 6 is avoided based on a result of this judgment, and a threshold value in the contact judgment section 12 is updated based on the output from the contact sensor 11 every predetermined time.
摘要翻译： 在其中安装有样品4的阶段和物镜6可以沿光轴方向相对移动的阶段中的至少一个的显微镜系统中，接触判断部12判断样品4与样品4之间的接触的可能性 物镜6基于来自检测样品4与物镜6之间的接触的接触传感器11的检测输出与预设阈值之间的比较结果，避免了样品4与物镜6之间的过度接触 基于该判定结果，根据来自接触传感器11的每一预定时间的输出来更新接触判定部12中的阈值。
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公开(公告)号：US20040112535A1
公开(公告)日：2004-06-17
申请号：US10689541
申请日：2003-10-21
IPC分类号： H01L021/306
摘要： A focus detecting device includes a multi-beam producing member for emitting a plurality of light beams; a light-intercepting member for intercepting a part of the plurality of light beams; a beam splitting member having a surface for reflecting or transmitting an incident light beam; a light-condensing optical system for condensing the incident light beam; and a photodetector having at least two light-receiving sections. The multi-beam producing member and the light-intercepting member are placed on a first path of light, and the light-condensing optical system and the photodetector are placed on a second path of light. The beam splitting member is located at the intersection of the optical axis of the first path of light with the optical axis of the second path of light, and the photodetector is located at a position where the light beam is condensed by the light-condensing optical system.
摘要翻译： 焦点检测装置包括用于发射多个光束的多光束产生部件; 用于截取所述多个光束的一部分的遮光部件; 分束构件，具有用于反射或透射入射光束的表面; 用于聚集入射光束的聚光光学系统; 以及具有至少两个光接收部的光检测器。 多光束产生构件和遮光构件被放置在第一光路上，并且聚光光学系统和光电检测器被放置在第二光路上。 分束构件位于第一光路的光轴与第二光路的光轴的交点处，光电检测器位于光束被聚光光学 系统。
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