公开(公告)号：US3619840A

公开(公告)日：1971-11-16

申请号：US3619840D

申请日：1969-07-10

申请人： OPTICAL COATING LABORATORY INC

发明人： SPELLMAN VERNON C ,  BERGFELT NILS H ,  SMALL EDWARD A

IPC分类号： H01J37/18 ,  H01J37/305 ,  H05B7/00

CPC分类号： H01J37/18 ,  H01J37/3053

摘要： ELECTRON BEAM EVAPORATION SOURCE HAVING AT LEAST ONE ELECTRON GUN AND IN WHICH EACH ELECTRON GUN IS PROVIDED WITH A WATER-COOLED CATHODE ASSEMBLY AND MEANS IS PROVIDED FOR ROTATING THE BODY OF MATERIAL WHICH IS TO BE EVAPORATED TO ACHIEVE A MORE UNIFORM RATE OF EVAPORATION. TO PERMIT OPERATION FOR LONG PERIODS OF TIME, MEANS IS PROVIDED FOR CONTINOUSLY SUPPLYING MATERIAL TO BE EVAPORATED. IN ADDITION, IN ORDER TO ACHIEVE GREATER EVAPORATION RATES, A PLURALITY OF ELECTRON GUNS ARE UTILIZED FOR EVAPORATING MATERIAL FROM THE SAME BODY OF MATERIAL.