公开(公告)号：US10884022B2

公开(公告)日：2021-01-05

申请号：US16476426

申请日：2017-12-07

Applicant: OSAKA UNIVERSITY

Inventor： Hayato Yamashita ,  Masayuki Abe

IPC: G01Q10/02 ,  G01Q10/04

Abstract: The present invention provides a scanner capable of achieving both a wide range of measurements and a high-speed and high-precision measurement.
A scanner comprising: an outer frame; a first inner frame disposed inside the outer frame; a wide range Y actuator for moving the first inner frame relative to the outer frame in the Y direction; a second inner frame disposed inside the first inner frame; a wide range X actuator for moving the second inner frame relative to the first inner frame in the X direction orthogonal to the Y direction; a third inner frame disposed inside the second inner frame; a narrow range Y actuator for moving the third inner frame relative to the second inner frame in the Y direction; a movable foundation disposed inside the third inner frame; and a narrow range X actuator for moving the movable foundation relative to the third inner frame in the X direction.

公开(公告)号：US10928433B2

公开(公告)日：2021-02-23

申请号：US15758175

申请日：2016-06-15

Applicant: OSAKA UNIVERSITY

Inventor： Masayuki Abe ,  Hiroshi Toki

IPC: G01R29/08 ,  G01R29/24 ,  G06F17/12 ,  G06F17/13 ,  G06F30/00 ,  G01R19/25

Abstract: It is possible to comprehensively calculate a potential and a current of a transmission line in an electric circuit, a potential and a current of an element, and an electromagnetic field including noise generated from the electric circuit. A computer performs a circuit configuration inputting step of inputting a circuit configuration of a distributed constant circuit and a lumped constant circuit and an initial value of each variable, and a calculating step of obtaining a scalar potential and a current in a multi-conductor transmission line, a scalar potential and a voltage in an element, and an electromagnetic radiation amount by, under the circuit configuration and the initial value, solving a basic equation of a transmission theory using a boundary condition formula at x=0 and w which are the boundary between the distributed constant circuit and the lumped constant circuit.