公开(公告)号：US20170023407A1

公开(公告)日：2017-01-26

申请号：US15300781

申请日：2014-04-03

Applicant: OTO PHOTONICS INC.

Inventor： Chien-Hsiang HUNG ,  Jan Liang YEH

IPC: G01J3/02

CPC classification number: G01J3/0256 ,  G01J3/0205 ,  G01J3/0262 ,  G01J3/18

Abstract: An fabrication method of a waveguide sheet for a spectrometer includes the steps of: providing a pattern to be performed by a microelectromechanical (MEM) process; and forming at least one waveguide sheet based on the provided pattern by the MEM process. The pattern includes a shape of a first waveguide sheet. The waveguide sheet includes at least one positioning side and at least one stray light elimination side formed by the MEM process. The positioning side is for a spectral component of the spectrometer to abut against so that the spectral component is positioned at the positioning side, and the stray light elimination side is to be used as a side of a stray light outlet. The structure of the waveguide sheet and the configuration of the spectrometer are also provided.

Abstract translation: 用于光谱仪的波导片的制造方法包括以下步骤：提供由微机电（MEM）工艺执行的图案; 以及通过MEM工艺基于所提供的图案形成至少一个波导片。 该图案包括第一波导片的形状。 波导片包括由MEM工艺形成的至少一个定位侧和至少一个杂散光消除侧。 定位侧用于光谱仪的光谱分量抵靠，使得光谱分量位于定位侧，并且杂散光消除侧用作杂散光出口的一侧。 还提供了波导片的结构和光谱仪的结构。