-
公开(公告)号:US20220416007A1
公开(公告)日:2022-12-29
申请号:US17771756
申请日:2021-03-09
发明人: Liang TANG , Liangliang LIU , Liman PENG , Yan WU , Nini BAI , Qiang CHEN , Xu LIU , Guodong JING , Qianqian ZHANG , Zhiyong XUE , Qiang GUO , Guofang XU , Zihua LI , Qiang WANG , Ruiqing ZHANG , Xudong WANG
IPC分类号: H01L27/32
摘要: Provided is a method for manufacturing an array substrate. The method includes: providing a base substrate with a conductive pattern layer, wherein the base substrate is provided with a display region and a peripheral region disposed around the display region, wherein the conductive pattern layer includes a plurality of conductive lines disposed in the peripheral region; forming an electrode material film layer on the conductive pattern layer; forming a mask layer on the electrode material film layer, wherein the mask layer includes a plurality of electrode layer patterns disposed in the display region and protection patterns disposed above the conductive lines; and etching the electrode material film layer and removing the mask layer.