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公开(公告)号:US20190324054A1
公开(公告)日:2019-10-24
申请号:US16460470
申请日:2019-07-02
IPC分类号: G01Q20/02
摘要: This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.
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公开(公告)号:US09383386B2
公开(公告)日:2016-07-05
申请号:US13999614
申请日:2014-03-12
IPC分类号: G01Q20/02
摘要: This invention relates to an optical light beam positioning system that enables the combination of two or more light beams of different wavelengths to be focused onto a probe or sample of a scientific instrument, such as an atomic force microscope, for a number of specific uses typical to AFMs, like measuring the deflection or oscillation of the probe and illuminating an object for optical imaging, and less traditional ones like photothermal excitation of the probe, photothermal activated changes in the sample, photothermal cleaning of the probe and photochemical, photovoltaic, photothermal and other light beam induced changes in the sample. The focused light beams may be independently positioned relative to each other.
摘要翻译: 本发明涉及一种光束定位系统,其能够将两个或更多个不同波长的光束的组合聚焦在诸如原子力显微镜的科学仪器的探针或样品上,用于典型的特定用途 对AFM进行测量,例如测量探头的偏转或振荡并照亮光学成像对象,较少传统的像探针的光热激发,样品中的光热激活变化,探针的光热清洗和光化学,光电,光热和 其他光束诱发样品的变化。 聚焦光束可以相对于彼此独立地定位。
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公开(公告)号:US10338096B2
公开(公告)日:2019-07-02
申请号:US15798941
申请日:2017-10-31
IPC分类号: G01Q20/02
摘要: This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.
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公开(公告)号:USRE49997E1
公开(公告)日:2024-06-04
申请号:US17365671
申请日:2021-07-01
IPC分类号: G01Q20/02
CPC分类号: G01Q20/02
摘要: This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.
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公开(公告)号:US20190064211A1
公开(公告)日:2019-02-28
申请号:US15692231
申请日:2017-08-31
发明人: David A. Grigg , Deron Walters , Haigang Zhang , Jason Cleveland
摘要: A scanning probe microscope has a probe configured to move across the surface of a sample to be monitored. A scanner, to which the probe is mounted, moves the probe across the sample surface such that the probe is deflected in accordance with the structure of the sample surface. A beam system directs a light beam at the probe during the movement of the probe across the sample surface and a detector monitors the deflection of the probe using the light beam. The arrangement is such that the scanner is physically independent of the beam system.
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公开(公告)号:US10705114B2
公开(公告)日:2020-07-07
申请号:US16460470
申请日:2019-07-02
IPC分类号: G01Q20/02
摘要: This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.
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公开(公告)号:US09804193B2
公开(公告)日:2017-10-31
申请号:US14931625
申请日:2015-11-03
IPC分类号: G01Q20/02
CPC分类号: G01Q20/02
摘要: This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.
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公开(公告)号:US10054612B2
公开(公告)日:2018-08-21
申请号:US15202427
申请日:2016-07-05
摘要: An optical light beam positioning system that enables the combination of two or more light beams of different wavelengths to be focused onto a probe or sample of a scientific instrument, such as an atomic force microscope, for a number of specific uses typical to AFMs, like measuring the deflection or oscillation of the probe and illuminating an object for optical imaging, and less traditional ones like photothermal excitation of the probe, photothermal activated changes in the sample, photothermal cleaning of the probe and photochemical, photovoltaic, photothermal and other light beam induced changes in the sample. The focused light beams may be independently positioned relative to each other.
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公开(公告)号:US20180128853A1
公开(公告)日:2018-05-10
申请号:US15798941
申请日:2017-10-31
IPC分类号: G01Q20/02
CPC分类号: G01Q20/02
摘要: This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.
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公开(公告)号:US20160313368A1
公开(公告)日:2016-10-27
申请号:US15202427
申请日:2016-07-05
摘要: An optical light beam positioning system that enables the combination of two or more light beams of different wavelengths to be focused onto a probe or sample of a scientific instrument, such as an atomic force microscope, for a number of specific uses typical to AFMs, like measuring the deflection or oscillation of the probe and illuminating an object for optical imaging, and less traditional ones like photothermal excitation of the probe, photothermal activated changes in the sample, photothermal cleaning of the probe and photochemical, photovoltaic, photothermal and other light beam induced changes in the sample. The focused light beams may be independently positioned relative to each other.
摘要翻译: 一种光束定位系统,其能够将不同波长的两个或更多个光束的组合聚焦到诸如原子力显微镜的科学仪器的探针或样品上,用于AFM的典型特征,如 测量探头的偏转或振荡并照亮光学成像的物体,较少传统的探针光热激发,样品中的光热激活变化,探针的光热清洗和光化学,光伏,光热等光束诱导 样品中的变化。 聚焦光束可以相对于彼此独立地定位。
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