公开(公告)号：US20160111846A1

公开(公告)日：2016-04-21

申请号：US14890155

申请日：2014-08-18

Applicant: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.

Inventor： TOMOHIRO MOCHIYAMA ,  KENKI KOYAMA ,  SATOSHI EGUCHI

IPC: H01S3/036 ,  B23K26/06 ,  H01S3/07

CPC classification number: H01S3/036 ,  B23K26/0643 ,  H01S3/0346 ,  H01S3/073 ,  H01S3/104

Abstract: A conventional gas laser oscillation apparatus cannot appropriately deal with an amount of laser gas introduced greater than normal use and can generate a turbulent flow around the total reflective mirror and the partial reflective mirror. This causes unstable discharge, resulting in unstable output of laser beams. The gas laser oscillation apparatus of the present disclosure has a laser oscillator, a first laser-gas inlet, a laser-gas outlet, a first laser-gas introducing port, a laser-gas circulation passage, and a second laser-gas introducing port. Disposed between a first discharge tube and any one of the total reflective mirror and a partial reflective mirror, the first laser-gas introducing port introduces laser gas into the laser oscillator. Disposed in the laser-gas circulation passage, the second laser-gas introducing port introduces laser gas into the laser-gas circulation passage. A laser-gas introducing section is connected to the first and the second laser-gas introducing ports.

Abstract translation: 传统的气体激光振荡装置不能适当地处理大于正常使用的激光气体的量，并且可以在全反射镜和部分反射镜周围产生湍流。 这导致不稳定的放电，导致激光束的输出不稳定。 本公开的气体激光振荡装置具有激光振荡器，第一激光气体入口，激光气体出口，第一激光气体导入口，激光气体循环通路和第二激光气体导入口 。 设置在第一放电管与全反射镜和部分反射镜中的任一个之间，第一激光气体导入口将激光气体引入激光振荡器。 在激光 - 气体循环通道中，第二激光气体引入口将激光气体引入激光气体循环通道。 激光气体导入部与第一和第二激光气体导入口连接。