MAGNETO-IMPEDANCE SENSING DEVICE METHOD AND MANUFACTURING METHOD THEREOF
    1.
    发明申请
    MAGNETO-IMPEDANCE SENSING DEVICE METHOD AND MANUFACTURING METHOD THEREOF 审中-公开
    磁阻电感传感装置方法及其制造方法

    公开(公告)号:US20170074951A1

    公开(公告)日:2017-03-16

    申请号:US15261114

    申请日:2016-09-09

    CPC classification number: G01R33/063 G01R27/2611 G01R33/0005 G01R33/0052

    Abstract: An electromagnetic impedance sensing device includes a substrate, a first patterned conductive layer, a second patterned conductive layer, a magneto-conductive wire and an encapsulation layer. The substrate has a surface and a trench extending into thereof. The first patterned conductive layer is formed on the surface, as well as a bottom and sidewalls of the trench. The magneto-conductive wire is disposed in the trench. The second patterned conductive layer extending across the trench and electrically in contact with the first patterned conductive layer is formed on the first patterned conductive layer to make the magneto-conductive wire sandwiched between the first and the second patterned conductive layers. The magneto-conductive wire is encapsulated by the encapsulation layer to make the magneto-conductive wire electrically isolated from the first and second patterned conductive layers. At least one coil circuit surrounding the magneto-conductive wire is formed by the first and second patterned conductive layers.

    Abstract translation: 电磁阻抗感测装置包括衬底,第一图案化导电层,第二图案化导电层,磁导电线和封装层。 衬底具有延伸到其中的表面和沟槽。 第一图案化导电层形成在表面上,以及沟槽的底部和侧壁。 磁导线设置在沟槽中。 延伸穿过沟槽并与第一图案化导电层电接触的第二图案化导电层形成在第一图案化导电层上,以使得磁导线夹在第一和第二图案化导电层之间。 磁导线被封装层封装,以使磁导线与第一和第二图案化导电层电隔离。 围绕磁导线的至少一个线圈电路由第一和第二图案化导电层形成。

    MAGNETO-IMPEDANCE SENSING DEVICE AND MANUFACTURING METHOD THEREOF
    2.
    发明申请
    MAGNETO-IMPEDANCE SENSING DEVICE AND MANUFACTURING METHOD THEREOF 审中-公开
    磁阻式感应装置及其制造方法

    公开(公告)号:US20170074950A1

    公开(公告)日:2017-03-16

    申请号:US15260501

    申请日:2016-09-09

    CPC classification number: G01R33/063 G01R33/0052 H01L43/08 H01L43/12

    Abstract: An electromagnetic impedance sensing device includes a first substrate, a first patterned conductive layer, a second substrate, a second patterned conductive layer, a magneto-conductive wire and an encapsulation layer. The first substrate has a first surface, and the first patterned conductive layer is formed on the first surface. The second substrate has a second surface facing to the first surface, and the second patterned conductive layer is formed on the second surface and electrically contacted to the first patterned conductive layer. The first and second patterned conductive layers are physically integrated to define an accommodation space allowing the magneto-conductive wire passing there through. The magneto-conductive wire is encapsulated by the encapsulation layer to make the magneto-conductive wire electrically isolated from the first and second patterned conductive layers, respectively. At least one coil circuit surrounding the magneto-conductive wire is formed by the first and second patterned conductive layers.

    Abstract translation: 电磁阻抗感测装置包括第一衬底,第一图案化导电层,第二衬底,第二图案化导电层,磁导线和封装层。 第一基板具有第一表面,并且第一图案化导电层形成在第一表面上。 第二衬底具有面向第一表面的第二表面,并且第二图案化导电层形成在第二表面上并与第一图案化导电层电接触。 第一和第二图案化的导电层被物理地集成以限定允许磁导线通过其的容纳空间。 磁导线由封装层封装,以使磁导线分别与第一和第二图案化导电层电隔离。 围绕磁导线的至少一个线圈电路由第一和第二图案化导电层形成。

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