-
1.发明授权Combination of normal and oblique incidence polarimetry for the characterization of gratings 有权用于表征光栅的正常和倾斜入射偏振方法的组合公开(公告)号：US06713753B1
公开(公告)日：2004-03-30
申请号：US09898641
申请日：2001-07-03
IPC分类号： G02F101
CPC分类号： G01N21/956 , G01B11/00
摘要： A normal incidence spectroscopic polarimeter is combined with an oblique incidence spectroscopic polarimeter to provide an accurate characterization of complex grating structures, e.g., structures with sloping sidewalls, with notches and with multiple underlying layers. The normal incidence spectroscopic polarimeter includes a polarizing element that is in the path of the normal incidence light beam such that the light beam is transmitted through the polarizing element before reaching the sample and after being reflected off the sample. The two systems may advantageously share a single light source and/or the spectrophotometer.
摘要翻译： 正常入射光谱偏振计与倾斜入射光谱旋光计结合，以提供复杂光栅结构的准确表征，例如具有倾斜侧壁的结构，具有凹口和多个下层。 正常入射光谱旋光计包括在法线入射光束的路径中的偏振元件，使得光束在到达样品之前并且被反射离开样品之后透射通过偏振元件。 两个系统可以有利地共享单个光源和/或分光光度计。
-
2.发明授权公开(公告)号：US08045179B1
公开(公告)日：2011-10-25
申请号：US12275078
申请日：2008-11-20
IPC分类号： G01B11/30
CPC分类号： G01B11/303 , G01B2210/56
摘要： Line edge roughness or line width roughness of a feature on a sample may be determined from incident radiation scattered from the feature. An amount of ordered scattered radiation characterized by a discrete diffraction order is determined and a diffuse scattered radiation signal is measured. A ratio between an intensity of the ordered scattered incident radiation and an intensity of the diffuse scattered radiation signal is determined. The line edge roughness or line width roughness is determined from the ratio.
摘要翻译： 样品上特征的线边缘粗糙度或线宽粗糙度可以从从特征散射的入射辐射来确定。 确定以离散衍射级为特征的有序散射辐射量，并测量漫散射辐射信号。 确定有序散射入射辐射的强度与漫散射辐射信号的强度之间的比率。 线边缘粗糙度或线宽粗糙度由该比率确定。
-
搜索结果
2 条记录 (耗时 0.019 秒)
