ROTARY SENSOR AND SENSOR SUBSTRATE

    公开(公告)号:US20250155266A1

    公开(公告)日:2025-05-15

    申请号:US18834127

    申请日:2022-11-28

    Abstract: A plurality of conductive parts are aligned along a rotational direction of a rotor. A different-thickness part relatively differs in thickness in one direction. In the rotor, a plurality of gaps are provided to separate the plurality of conductive parts from each other. An excitation coil is annularly arranged on a counter surface of a substrate. A detection coil is disposed inside the excitation coil on the counter surface of the substrate. A detection electrode part is disposed on the counter surface of the substrate such that the detection electrode part overlaps part of a rotation trajectory of the different-thickness part at a time of rotation of the rotor in plan view in the one direction, and the detection electrode part is configured to detect capacitance generated between the detection electrode part and the rotor.

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